Spin Rinse Dryer For Wafer 4in – 12in Customization Available
| Brand | XWS |
| Model | XWS01189 |
| Condition | Brand-New |
| Warranty | 1 year |
| Stock | In stock |
| Ship from | China |
| Basic Function | DIW Rinse,Pipe Purge,Spin Dry,Hot N2. |
| Motor | DC brushless motor |
| Max. Speed of spin | 2,800rpm |
Features:
Brand-New spin rinse dryer developed and made in China.
Basic Function: DIW Rinse,Pipe Purge,Spin Dry,Hot N2.
Max. Speed of spin: Up to 2,800rpm(200 mm/2400rpm300mm/2000rpm.
With N2 continuous purge. N2 flow can be heated up to 70C.
With DIW Resistance meter.
With Anti-Static Device. With N2 Low flow interlock.
With EMO function.
Capacity: Up to 15 recipes.
Max. Steps per recipe: Up to 10 steps.
With Auto-Clean Function.
The vibration is less than 350 um while rotor spinning.(200 mm/ 300 mm,300 um).
Spin speed tolerance:Less than 10%.
With SUS-316L-EP Rotor. With SUS-316L-EP Bowl.
With Viton door seal &real seal.
Use Air seal for motor and Bowl.
With Brushless Motor.
With non-contact N2 heater.
With 0.003um filter.
All PTFE DI and N2 Valve.
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